BUSINESS

Semiconductor

Exhaust Reduction System

본문

It is an equipment that uses a wet treatment method to discharge harmful gases occurred

in manufacturing processes such as Semiconductors, LEDs, OLEDs, and LCDs, and provides a clean environment at the manufacturing site.





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Feature

  • 1. 2 packed scrubber zone
  • - 2High abatement efficiency by configuration of 2 packed scrubber zone & separate circulation for each zone
  • - Abatement efficiency : ≤ 90%
  • 2. Compact footprint design
  • 3. Reduction of water consumption
  • - Control water flow rate by normal & idle mode 
  • 4. Pump & gravity drain
  • 5. Bypass function by auto damper

Application

  • - Manufacturing process of Semiconductors, LEDs, OLEDs, LCDs